Thermal evaporator Nano-PVD-T15A

Thermal evaporator Nano-PVD-T15A allows deposition of ultrathin metallic films on various substrates. This benchtop device offers a possibility of simultaneous evaporation of two metals from two different low-temperature sources. Also quartz crystal microbalance, which is installed inside the chamber, enables monitoring of thickness of currently evaporated layer. Substrate stage can rotate with a given speed in order to provide uniform film growth. Shutters mounted by the substrate stage and near thermal sources prevent from an excess deposition of material. Metals that can be evaporated in our system are gold, silver, aluminium, tin dioxide, titanium and nickel.

System overview