Laser annealing setups

Laser annealing is a technique where laser light illuminates absorbing substrate causing local heat-up of the sample. In our laboratory we utilize 3 laser sources, presented in table:


Operation mode Maximum power Gain medium
450 CW 6W Diode
980 CW 30W Optical fiber
980 CW 70W Optical fiber

Our optical fiber sources foun applications in laser annealing of block copolymer thin films on silicon. By changing an optics operating mode can be changed from zone anneling (laser line) to RTP setup.