Laser annealing is a technique where laser light illuminates absorbing substrate causing local heat-up of the sample. In our laboratory we utilize 3 laser sources, presented in table:
Wavelenght |
Operation mode | Maximum power | Gain medium |
450 | CW | 6W | Diode |
980 | CW | 30W | Optical fiber |
980 | CW | 70W | Optical fiber |
Our optical fiber sources foun applications in laser annealing of block copolymer thin films on silicon. By changing an optics operating mode can be changed from zone anneling (laser line) to RTP setup.
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